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Cleanroom Class Chart

ISO 14644-1 AND FS 209E CLASS LIMITS

Summary of Class Limits at 0.5 Micron

Class Name Class Limit @
0.5µ / FT3:
Class Limit @
0.5µ / M3:
ISO: 209E:
3 1 1 35
4 10 10 352
5 100 100 3,520
6 1,000 1,000 35,200
7 10,000 10,000 352,000
8 100,000 100,000 3,520,000
9 NA NA 35,200,000

Summary of Class Limits at All Sizes

Class Name Class Limits: M3 Class Limits: FT3
ISO: 209E 0.1 0.2 0.3 0.5 1 5 0.1 0.2 0.3 0.5 1 5
1 10 2 0 0
2 10 100 24 10 4 3 1 0 0
3 100 1,000 237 102 35 8 28 7 3 1 0
4 1,000 10,000 2,370 1,020 352 83 283 67 29 10 2 0
5 10,000 100,000 23,700 10,200 3,520 832 29 2,833 671 289 100 24 1
6 100,000 1,000,000 237,000 102,000 35,200 8,320 293 28,330 6,714 2,890 997 236 8
7 1,000,000 352,000 83,200 2,930 9,972 2,357 83
8 10,000,000 3,520,000 832,000 29,300 99,722 23,571 830
9 35,200,000 8,320,000 293,000 99,7216 235,706 8,301